A few of our past projects…

  • MEMS Tunneling Accelerometer:

  • Lateral Tunneling Accelerometer: Characterization and Controller
  • Applications in Parametric Resonance Phenomenon: Characterization and Controller
  • Mechanical Loss in Silicon Resonators: Thermo-Elastic Damping & Support Loss
  • Mechanical Filters Based on Parametric Resonance
  • A Novel Design for Atomic Force Microscopy
  • Biological Sensing: Flexural Plate Wave Device
  • Low-Cost Intertial Navigation System: Based on High Aspect MEMS Resonator
  • AlN Acoustic Resonators: For RF Filter & HF Mass Detection
  • Dynamic Friction Modeling for Micro and Nano Systems
  • …and many more! (See Publications)