UCSB Engineering

Susanne Stemmer



Susanne Stemmer


Materials Department
University of California
Santa Barbara, CA 93106

tel: (805) 893-6128

Personal web site

Research Description

Research explores the relationship between microstructures and dielectric and electrical properties of novel functional oxide thin films. Work includes development of new high-permittivity oxide thin films for frequency agile microwave devices, fundamental studies on ferroelectric thin films, understanding interface stability in alternative gate dielectrics for silicon CMOS, and application of novel scanning transmission electron microscopy techniques to problems in materials science.

Novel transmission electron microscopy imaging and spectroscopy techniques, such as Z-contrast imaging and atomic resolution EELS.


  • NSF Career Award, 2001

Selected Publications

  • Atomic Structure of (111) SrTiO3/Pt Interfaces, Applied Physics Letters, 88, 2006, 131914, S. Schmidt, D. O. Klenov, S. P. Keane, J. W. Lu, T. E. Mates, S. Stemmer, web link
  • Contributions to the Contrast in Experimental High-Angle Annular Dark-Field Images, Ultramicroscopy, 106, 2006, 889-901, D. O. Klenov, S. Stemmer, web link
  • Detection and mobility of hafnium in SiO2, Applied Physics Letters, 89, 2006, 041918, D. O. Klenov, T. E. Mates, S. Stemmer, web link
  • Distributed Phase Shifter with Pyrochlore Bismuth Zinc Niobate Thin Films,, IEEE Microwave and Wireless Components Letters, 16, 2006, 264, J. Park, J. W. Lu, D. S. Boesch, S. Stemmer, R. A. York, web link
  • Influence of AlN layers on the interface stability of HfO2 gate dielectric stacks, Applied Physics Letters, 89, 2006, 041906, M. P. Agustin, H. Alshareef, M. A. Quevedo-Lopez, S. Stemmer, web link
  • Limitations in through-focus depth sectioning in non-aberration corrected high-angle annular dark-field imaging, Japanese Journal of Applied Physics Pt. 2, 45, 2006, L602 - L604, D. O. Klenov, S. Stemmer,, web link
  • Low-loss tunable capacitors fabricated directly on gold bottom electrodes, Applied Physics Letters, 88, 2006, 112905, J.W. Lu, S. Schmidt, D. S. Boesch, N. Pervez, R. A. York, S. Stemmer, web link
  • Phase transitions in textured SrTiO3 thin films on epitaxial Pt electrodes, Journal of Applied Physics, 99, 2006, 033521, S. P. Keane, S. Schmidt, J. W. Lu, A. E. Romanov, S. Stemmer, web link
  • Scanning transmission electron microscopy investigations of interfacial layers in HfO2 gate stacks, Journal of Applied Physics, 100, 2006, 024103, M. P. Agustin, G. Bersuker, B. Foran, L. A. Boatner, S. Stemmer, web link
  • Scanning transmission electron microscopy of gate stacks with HfO2 dielectrics and TiN electrodes, Applied Physics Letters, 87, 2005, 121909, M. P. Agustin, L. R. C. Fonseca, J. C. Hooker, S. Stemmer, web link